E/Q TYPE GERMANY JAPAN TAIWAN KOREA SUB TOTAL
TMAH238 Analysis System 1    3   4
TMAH238 Control System     21 18 39
TMAH040 Dilution System   1 2   3
TMAH048 Dilution System     1   1
TMAH238 Dilution System   7 6 1 14
TMAH238 DRS(Continuous Type)     19 1 20
TMAH238 PRSS   1 19 3 23
Stripper management system   1     1
Surfactant4% Dilution System   1     1
Surfactant5% Dilution System   9     9
Surfactant2.5% Dilution System     1   1
TMAH238 C-PRSS   1     1
NAOH Dilution System   2     2
NAOH Control System   3     3
KOH Control System/Dilution System     21 1 22
TOTAL 1 26 93 24 144