E/Q TYPE |
GERMANY |
JAPAN |
TAIWAN |
KOREA |
SUB TOTAL |
TMAH238 Analysis System |
1 |
|
3 |
|
4 |
TMAH238 Control System |
|
|
21 |
18 |
39 |
TMAH040 Dilution System |
|
1 |
2 |
|
3 |
TMAH048 Dilution System |
|
|
1 |
|
1 |
TMAH238 Dilution System |
|
7 |
6 |
1 |
14 |
TMAH238 DRS(Continuous Type) |
|
|
19 |
1 |
20 |
TMAH238 PRSS |
|
1 |
19 |
3 |
23 |
Stripper management system |
|
1 |
|
|
1 |
Surfactant4% Dilution System |
|
1 |
|
|
1 |
Surfactant5% Dilution System |
|
9 |
|
|
9 |
Surfactant2.5% Dilution System |
|
|
1 |
|
1 |
TMAH238 C-PRSS |
|
1 |
|
|
1 |
NAOH Dilution System |
|
2 |
|
|
2 |
NAOH Control System |
|
3 |
|
|
3 |
KOH Control System/Dilution System |
|
|
21 |
1 |
22 |
TOTAL |
1 |
26 |
93 |
24 |
144 |