Develop Control System(DCS)
DCS

SYSTEM OVERVIEW

  • Monitor C/D Tools Cir Tank's developer and Photo-resist concentration
  • Using fresh Process chemical to control Photo-resist concentration
  • Using highly concentrated fresh chemical to control developer's concentration
  • Reduction in using fresh developer ; extend developer's life span

Suitable for TFT, CF, LED Industrial TMAH, KOH, NAOH
1 vs N LINE Recycle System(DRS/PRSS)
DRS/PRSS

SYSTEM OVERVIEW

  • Removing photo resistance and recycle TMAH by using PRSS
  • The condition of Photo resistance can be re-use under near fresh condition

Suitable for TFT Industrial TMAH
1 vs 1 DCS + PRSS(DVRC)
DC-PRSS

SYSTEM OVERVIEW

  • With concentration monitoring function that can add in TMAH 2.38% of fresh chemical to waste and passing thru photo resistance removing membrane to achieve TMAH recycle and reuse.
  • The condition of Photo resistance can be re-use under near fresh condition
  • Compact design can easily fit beside process tools for easy monitoring
  • Easy expansion

Suitable for TFT Industrial TMAH
1 vs 1 C-PRSS
C-PRSS

SYSTEM OVERVIEW

  • Removing photo resistance and recycle TMAH by using PRSS
  • The condition of Photo resistance can be re-use under near fresh condition
  • Compact design can easily fit beside process tools for easy monitoring
  • Easy expansion

Suitable for TFT Industrial TMAH